{"id":7052,"date":"2023-11-20T11:24:34","date_gmt":"2023-11-20T10:24:34","guid":{"rendered":"https:\/\/tera-environnement.com\/maitrise-de-contamination\/air-de-salle-blanche\/"},"modified":"2026-03-18T12:34:50","modified_gmt":"2026-03-18T11:34:50","slug":"cleanroom-air","status":"publish","type":"page","link":"https:\/\/tera-environnement.com\/en\/contamination-control\/cleanroom-air\/","title":{"rendered":"Cleanroom air"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"7052\" class=\"elementor elementor-7052 elementor-2037\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5c035fdc elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5c035fdc\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-793271d9\" data-id=\"793271d9\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-1c4a655d elementor-widget elementor-widget-shortcode\" data-id=\"1c4a655d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"shortcode.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-shortcode\"><ul id=\"breadcrumbs\"><li><a href=\"https:\/\/tera-environnement.com\/en\/\">Home<\/a><\/li><\/ul><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2879c1dd elementor-widget__width-auto elementor-widget elementor-widget-image\" data-id=\"2879c1dd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"68\" height=\"69\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2023\/09\/fleche-grise.png\" class=\"attachment-large size-large wp-image-389\" alt=\"\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-440b2ffe elementor-widget__width-auto elementor-widget elementor-widget-heading\" data-id=\"440b2ffe\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">Cleanroom air<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t<div class=\"elementor-element elementor-element-3e6e9a5 e-flex e-con-boxed e-con e-parent\" data-id=\"3e6e9a5\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-0af7a5a elementor-widget elementor-widget-spacer\" data-id=\"0af7a5a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-274d32e0 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"274d32e0\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-40c672c\" data-id=\"40c672c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-50993c8b elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"50993c8b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"628\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image1-7.jpg\" class=\"attachment-large size-large wp-image-2975\" alt=\"\" srcset=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image1-7.jpg 904w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image1-7-300x236.jpg 300w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image1-7-768x603.jpg 768w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image1-7-600x471.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-713de6\" data-id=\"713de6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-660c8ea3 elementor-widget elementor-widget-heading\" data-id=\"660c8ea3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">What are the air quality requirements for cleanrooms?<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-19a5be76 elementor-widget elementor-widget-text-editor\" data-id=\"19a5be76\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Cleanrooms are rooms where the concentration of airborne particles is controlled and kept at a very low level.<\/p><p>They are used by companies who need a very clean and sterile environment to manufacture or handle sensitive products, such as drugs, electronic chips, aerospace components, etc.<\/p><p>Cleanrooms help improve product quality, safety, reliability and regulatory compliance.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t<div class=\"elementor-element elementor-element-95d0a2b e-flex e-con-boxed e-con e-parent\" data-id=\"95d0a2b\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-b56e78d e-con-full e-flex e-con e-child\" data-id=\"b56e78d\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-6a909399 elementor-widget elementor-widget-text-editor\" data-id=\"6a909399\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Cleanrooms are classified according to international standards, such as ISO 14644, which define the level of air cleanliness according to the number and size of particles allowed. Cleanroom classes range from 1 to 9, with 1 being the cleanest and 9 the least clean. Companies must choose the cleanroom class best suited to their business sector and purpose.  <\/p><p>Contamination control in microelectronics rooms is essential to guarantee the quality of manufactured products, and to protect the environment and operators. Cleanrooms are used to minimize the concentration of airborne particles that can damage sensitive electronic products. They are controlled environments where temperature, humidity and pressure are regulated to minimize contamination. International standards are used to design a cleanroom and ensure that manufactured products meet quality requirements.   <\/p><p>Photolithography, a set of techniques for transferring an image (usually displayed on a mask) to a substrate, requires this type of controlled environment.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-8af69cb e-flex e-con-boxed e-con e-parent\" data-id=\"8af69cb\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-50d4ca2 e-con-full e-flex e-con e-child\" data-id=\"50d4ca2\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-847d0d6 elementor-widget elementor-widget-image\" data-id=\"847d0d6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"800\" height=\"286\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image2-2-1024x366.jpg\" class=\"attachment-large size-large wp-image-2977\" alt=\"\" srcset=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image2-2-1024x366.jpg 1024w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image2-2-300x107.jpg 300w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image2-2-768x274.jpg 768w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image2-2-600x214.jpg 600w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image2-2.jpg 1386w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-4313d13 e-con-full e-flex e-con e-child\" data-id=\"4313d13\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-88ce46a elementor-widget elementor-widget-text-editor\" data-id=\"88ce46a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>This technique is widely used in the semiconductor industry. Surface contamination can affect many of the subsequent steps in the photolithography process. Common issues are reduced adhesion and inclusion of defects. The key to eliminating these problems is to keep substrates as clean as possible.   <\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-34a8abb elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"34a8abb\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-769464da\" data-id=\"769464da\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-71e8bcdc elementor-widget elementor-widget-heading\" data-id=\"71e8bcdc\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">How to control air contamination in cleanrooms?<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e09033a elementor-widget elementor-widget-text-editor\" data-id=\"5e09033a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>It is necessary to control all supplies, liquids, machines, etc. that are newly incorporated into a cleanroom, as well as to carry out regular monitoring of cleanroom air quality.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-2594b03 e-flex e-con-boxed e-con e-parent\" data-id=\"2594b03\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-af7469f elementor-widget elementor-widget-text-editor\" data-id=\"af7469f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong> TERA Environnement can support you in these 5 fields:<\/strong><\/p><ul><li style=\"list-style-type: none;\"><ul><li>Measuring chemical contamination in the air: Airborne Molecular Contamination (AMC)<\/li><li>Measuring surface chemical contamination: Surface Molecular Contamination (SMC)<\/li><li>Characterizing the outgassing potential of materials before introduction into cleanrooms<\/li><li>Monitoring the shelf-life of molecular filters<\/li><li>Searching for trace contaminants in deionized water EDI<\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t<div class=\"elementor-element elementor-element-10928aee e-flex e-con-boxed e-con e-parent\" data-id=\"10928aee\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-7b559784 elementor-widget elementor-widget-heading\" data-id=\"7b559784\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Why choose TERA Environnement for your cleanroom contamination control?<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4122de84 elementor-widget elementor-widget-text-editor\" data-id=\"4122de84\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Our laboratory has over 20 years&#8217; experience in cleanroom contamination control, and is backed with high-performance analytical equipment for the analysis of a wide range of organic and inorganic chemical contaminants present in air or on surfaces at trace levels.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bd7a5e4 elementor-widget elementor-widget-text-editor\" data-id=\"bd7a5e4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong> Find out why you should choose our laboratory to help you control contamination in your cleanroom:<\/strong> <\/p><ul><li style=\"list-style-type: none;\"><ul><li>Over 20 years&#8217; experience in cleanroom air analysis<\/li><li>High-performance analytical equipment for your analyses<\/li><li>Wide range of compounds that can be analyzed<\/li><li>Very low analytical thresholds or limits of quantification (LOQ) ranging from ppt to ppb<\/li><li>Flexibility and responsiveness<\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-1d346f7d e-flex e-con-boxed e-con e-parent\" data-id=\"1d346f7d\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-0834241 elementor-widget elementor-widget-spacer\" data-id=\"0834241\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dc01dbc elementor-widget elementor-widget-heading\" data-id=\"dc01dbc\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Technical means for monitoring chemical contamination of air and surfaces in cleanrooms<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-af64c10 e-flex e-con-boxed e-con e-parent\" data-id=\"af64c10\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-e933160 elementor-widget elementor-widget-text-editor\" data-id=\"e933160\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The samplers to be used depend on the molecules targeted for analysis, the sampling environment and the thresholds to be reached (LQ).<\/p><p>It is recommended to take regular measurements of air quality in a cleanroom in order to have a reference state in the event of a &#8220;crisis&#8221;, and to be able to trace back more easily to the element contributing to the contamination problem.<\/p><p>Cleanroom air analyses are therefore carried out before any contamination problem, during a crisis, but also after a problem, in order to confirm the return to an acceptable level of contamination for the activities involved in the cleanroom. <\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e92679a elementor-widget elementor-widget-accordion\" data-id=\"e92679a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"accordion.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-accordion\">\n\t\t\t\t\t\t\t<div class=\"elementor-accordion-item\">\n\t\t\t\t\t<div id=\"elementor-tab-title-2441\" class=\"elementor-tab-title\" data-tab=\"1\" role=\"button\" aria-controls=\"elementor-tab-content-2441\" aria-expanded=\"false\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon elementor-accordion-icon-left\" aria-hidden=\"true\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon-closed\"><i class=\"fas fa-plus\"><\/i><\/span>\n\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon-opened\"><i class=\"fas fa-minus\"><\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t<a class=\"elementor-accordion-title\" tabindex=\"0\">Measuring airborne chemical contamination: Airborne Molecular Contamination (AMC) <\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<div id=\"elementor-tab-content-2441\" class=\"elementor-tab-content elementor-clearfix\" data-tab=\"1\" role=\"region\" aria-labelledby=\"elementor-tab-title-2441\"><p>TERA Environnement can provide you with the following samplers:<\/p>\n<ul>\n<li style=\"list-style-type: none;\">\n<ul>\n<li>Bubbler and bubbling solution<\/li>\n<li>Thermodesorption tube<\/li>\n<li>Filter<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>In some cases, the use of Radiello passive samplers or other active supports may be considered.<\/p>\n<table>\n<tbody>\n<tr>\n<th>Compounds <\/th>\n<th>Sampling method <\/th>\n<th>Analytical method<\/th>\n<\/tr>\n<tr>\n<td class=\"transparent\"><strong>Acids <\/strong><\/td>\n<td class=\"transparent\">bubbler and bubbling solution<\/td>\n<td class=\"transparent\">IC<\/td>\n<\/tr>\n<tr>\n<td><strong>Bases <\/strong><\/td>\n<td>bubbler and bubbling solution<\/td>\n<td>IC<\/td>\n<\/tr>\n<tr>\n<td class=\"transparent\"><strong>Metals <\/strong><\/td>\n<td class=\"transparent\">bubbler and bubbling solution<\/td>\n<td class=\"transparent\">ICP MS or ICP OES<\/td>\n<\/tr>\n<tr>\n<td><strong>VOCs <\/strong><\/td>\n<td>thermodesorption tubes <\/td>\n<td>ATD GC MS<\/td>\n<\/tr>\n<tr>\n<td class=\"transparent\"><strong>Condensables <\/strong><\/td>\n<td class=\"transparent\">thermodesorption tubes <\/td>\n<td class=\"transparent\">ATD GC MS<\/td>\n<\/tr>\n<tr>\n<td><strong>Crystalline silica <\/strong><\/td>\n<td>PVC filter <\/td>\n<td>DRX<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-accordion-item\">\n\t\t\t\t\t<div id=\"elementor-tab-title-2442\" class=\"elementor-tab-title\" data-tab=\"2\" role=\"button\" aria-controls=\"elementor-tab-content-2442\" aria-expanded=\"false\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon elementor-accordion-icon-left\" aria-hidden=\"true\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon-closed\"><i class=\"fas fa-plus\"><\/i><\/span>\n\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon-opened\"><i class=\"fas fa-minus\"><\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t<a class=\"elementor-accordion-title\" tabindex=\"0\">Measuring surface chemical contamination: Surface Molecular Contamination (SMC) <\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<div id=\"elementor-tab-content-2442\" class=\"elementor-tab-content elementor-clearfix\" data-tab=\"2\" role=\"region\" aria-labelledby=\"elementor-tab-title-2442\"><p>TERA Environnement can provide you with the following samplers:<\/p>\n<ul>\n<li>Soaked wipes<\/li>\n<li>Wafer for characterizing compounds deposited on surfaces.<\/li>\n<\/ul>\n<style>\n        table {\n            border-collapse: collapse;\n            width: 100%;\n        }\n        th, td {\n            border: 1px solid #48a3b8;\n            padding: 8px;\n            text-align: center;\n            font-family: DM Sans;\n            font-size: 16px;\n        }\n        th {\n            background-color: #48a3b8;\n            text-align: center;\n            font-family: DM Sans;\n            color: white;\n        }\n        .transparent {\n            background-color: #ddebf6\n        }\n    <\/style>\n<p><\/head><br \/>\n<body><\/p>\n<table>\n<tr>\n<th>Compounds<\/th>\n<th>Sampling method<\/th>\n<th>Analytical method<\/th>\n<\/tr>\n<tr>\n<td class=\"transparent\"><strong>Acids<\/strong><\/td>\n<td class=\"transparent\">swabbing with an EDI-soaked wipe or leaching with EDI<\/td>\n<td class=\"transparent\">IC<\/td>\n<\/tr>\n<tr>\n<td><strong>Bases<\/strong><\/td>\n<td>swabbing with an EDI-soaked wipe or leaching with EDI<\/td>\n<td>IC<\/td>\n<\/tr>\n<tr>\n<td class=\"transparent\">Metals<\/td>\n<td class=\"transparent\">swabbing with a wipe soaked in deionized water or leaching with deionized water<\/td>\n<td class=\"transparent\">ICP MS or ICP OES<\/td>\n<\/tr>\n<tr>\n<td><strong>VOCs<\/strong><\/td>\n<td>swabbing with a wipe soaked in an organic solvent or leaching with an organic solvent <\/td>\n<td>ID GC MS <\/td>\n<\/tr>\n<tr>\n<td class=\"transparent\"><strong>Organophosphorus<\/strong><\/td>\n<td class=\"transparent\">wafer exhibition<\/td>\n<td class=\"transparent\">(WOS) ATD GC MS<\/td>\n<\/tr>\n<tr>\n<td><strong>Condensables<\/strong><\/td>\n<td>wafer display<\/td>\n<td>(WOS) ATD GC MS<\/td>\n<\/tr>\n<\/table>\n<p><\/p>\n<p>If possible, as an alternative to wipes, deposits can also be sent directly to the laboratory for analysis.<br \/>\nWOS ATD GC MS measurements are presented below. This is a state-of-the-art technique specifically designed to detect chemical contamination caused by low-volatility or non-volatile compounds (condensables and organophosphates) deposited on surfaces.<\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-ee7a6d2 e-flex e-con-boxed e-con e-parent\" data-id=\"ee7a6d2\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-604f1e3 elementor-widget elementor-widget-spacer\" data-id=\"604f1e3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-def91a7 e-flex e-con-boxed e-con e-parent\" data-id=\"def91a7\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-58070b05 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"58070b05\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Specific WOS ATD GCMS analysis for \"heavy compounds <\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-4a18927 e-flex e-con-boxed e-con e-parent\" data-id=\"4a18927\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-568ac84 e-con-full e-flex e-con e-child\" data-id=\"568ac84\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-e5190c3 elementor-widget elementor-widget-spacer\" data-id=\"e5190c3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7af0024 elementor-widget elementor-widget-text-editor\" data-id=\"7af0024\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>TERA Environnement has a WOS ATD GCMS for the analysis of condensables and organophosphorus compounds.<\/p><p>Measurements are carried out on 6, 8 or 12 inch wafers<span style=\"background-color: var(--bs-body-bg);\">(~ 15, <\/span><span style=\"background-color: var(--bs-body-bg);\">~ 20 or 30 cm) previously exposed in a cleanroom for several days.<\/span><\/p><p>The wafers are then sent to the laboratory for degassing (WOS) and ATD GC MS analysis.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-2265e07 e-con-full e-flex e-con e-child\" data-id=\"2265e07\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-b5d637e elementor-widget elementor-widget-image\" data-id=\"b5d637e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"637\" height=\"425\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image3.jpg\" class=\"attachment-large size-large wp-image-2983\" alt=\"\" srcset=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image3.jpg 637w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image3-300x200.jpg 300w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image3-600x400.jpg 600w\" sizes=\"(max-width: 637px) 100vw, 637px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-735727c elementor-widget elementor-widget-text-editor\" data-id=\"735727c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><em>WOS: degassing of molecules present on the wafer surface and recovery of degassed compounds on a thermodesorption tube <\/em><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-9dfb019 e-flex e-con-boxed e-con e-parent\" data-id=\"9dfb019\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-d708d79 e-con-full e-flex e-con e-child\" data-id=\"d708d79\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-0e88e84 elementor-widget elementor-widget-image\" data-id=\"0e88e84\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"555\" height=\"370\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image4-2.jpg\" class=\"attachment-large size-large wp-image-2989\" alt=\"\" srcset=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image4-2.jpg 555w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image4-2-300x200.jpg 300w\" sizes=\"(max-width: 555px) 100vw, 555px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bf10d37 elementor-widget elementor-widget-text-editor\" data-id=\"bf10d37\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><em>Thermodesorption tube analysis in ATD GC MS<\/em><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-fecbe96 e-con-full e-flex e-con e-child\" data-id=\"fecbe96\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-2d4ce7f elementor-widget elementor-widget-image\" data-id=\"2d4ce7f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"620\" height=\"426\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image5-2.png\" class=\"attachment-large size-large wp-image-2991\" alt=\"\" srcset=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image5-2.png 620w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image5-2-300x206.png 300w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image5-2-600x412.png 600w\" sizes=\"(max-width: 620px) 100vw, 620px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-167f01d elementor-widget elementor-widget-text-editor\" data-id=\"167f01d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><em>Mass spectrum of an organophosphorus<\/em><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-615f12b e-flex e-con-boxed e-con e-parent\" data-id=\"615f12b\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-bf3082b elementor-widget elementor-widget-text-editor\" data-id=\"bf3082b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>In terms of analysis, it is possible to carry out screening of the compounds present or to target specific ones.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8313764 elementor-widget elementor-widget-heading\" data-id=\"8313764\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Characterization of potential outgassing of \u00b5-CTE materials<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-73250b6 e-flex e-con-boxed e-con e-parent\" data-id=\"73250b6\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-bf237a8 e-con-full e-flex e-con e-child\" data-id=\"bf237a8\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-31d716f elementor-widget elementor-widget-image\" data-id=\"31d716f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"442\" height=\"290\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image8-2.jpg\" class=\"attachment-large size-large wp-image-2995\" alt=\"\" srcset=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image8-2.jpg 442w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/03\/Image8-2-300x197.jpg 300w\" sizes=\"(max-width: 442px) 100vw, 442px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-d125283 e-con-full e-flex e-con e-child\" data-id=\"d125283\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-d388ae7 elementor-widget elementor-widget-text-editor\" data-id=\"d388ae7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Before introducing new materials into the cleanroom, it is important to determine whether these materials can potentially emit compounds critical to cleanroom operations.<\/p><p>The material is placed inside the outgassing micro-chamber and swept by a stream of nitrogen (or air).<\/p><p>The appropriate sampler is placed at the \u00b5-CTE microchamber outlet to target the molecules of interest (e.g. bubbler for acids or tubes for VOCs).<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-87628e8 e-flex e-con-boxed e-con e-parent\" data-id=\"87628e8\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-a4493f3 elementor-widget elementor-widget-accordion\" data-id=\"a4493f3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"accordion.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-accordion\">\n\t\t\t\t\t\t\t<div class=\"elementor-accordion-item\">\n\t\t\t\t\t<div id=\"elementor-tab-title-1721\" class=\"elementor-tab-title\" data-tab=\"1\" role=\"button\" aria-controls=\"elementor-tab-content-1721\" aria-expanded=\"false\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon elementor-accordion-icon-left\" aria-hidden=\"true\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon-closed\"><i class=\"fas fa-plus\"><\/i><\/span>\n\t\t\t\t\t\t\t\t<span class=\"elementor-accordion-icon-opened\"><i class=\"fas fa-minus\"><\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t<a class=\"elementor-accordion-title\" tabindex=\"0\">Characteristics of the outgassing micro-chamber<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<div id=\"elementor-tab-content-1721\" class=\"elementor-tab-content elementor-clearfix\" data-tab=\"1\" role=\"region\" aria-labelledby=\"elementor-tab-title-1721\"><ul>\n<li>Diameter: 6 cm<\/li>\n<li>Depth: 5 cm<\/li>\n<li>Air or Nitrogen flow<\/li>\n<li>Degassing temperature: 30\u00b0C to 250\u00b0.<\/li>\n<\/ul>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-1542dd5 e-flex e-con-boxed e-con e-parent\" data-id=\"1542dd5\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-e8deb2e elementor-widget elementor-widget-spacer\" data-id=\"e8deb2e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-854cc8e e-flex e-con-boxed e-con e-parent\" data-id=\"854cc8e\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-f70acc3 elementor-widget elementor-widget-heading\" data-id=\"f70acc3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Monitoring of molecular filters lifetime<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-95846c8 elementor-widget elementor-widget-text-editor\" data-id=\"95846c8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The filters used in cleanrooms filter both indoor and outdoor air, ensuring better control of air contamination in the cleanroom. Different filters are used, depending on the family of compounds to be filtered: acids, bases or VOCs. <\/p><p>The lifespan of filters can be determined by regularly measuring their level of contamination, and thus anticipating their replacement.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4f116ac elementor-widget elementor-widget-html\" data-id=\"4f116ac\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"html.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t    <style>\r\n        table {\r\n            border-collapse: collapse;\r\n            width: 100%;\r\n        }\r\n        th, td {\r\n            border: 1px solid #48a3b8;\r\n            padding: 8px;\r\n            text-align: center;\r\n            font-family: DM Sans;\r\n            font-size: 16px;\r\n        }\r\n        th {\r\n            background-color: #48a3b8;\r\n            text-align: center;\r\n            font-family: DM Sans;\r\n            color: white;\r\n        }\r\n        .transparent {\r\n            background-color: #ddebf6\r\n        }\r\n    <\/style>\r\n<\/head>\r\n<body>\r\n\r\n<table style=\"table-layout: fixed;  \">\r\n    <tr>\r\n        <th>Compounds<\/th>\r\n<th>Sample<\/th>\r\n<th>Analytical method<\/th>\r\n    <\/tr>\r\n    <tr>\r\n        <td class=\"transparent\"><strong>Acids<\/strong><\/td>\r\n<td class=\"transparent\">piece of filter extracted with DI water<\/td>\r\n<td class=\"transparent\">IC<\/td>\r\n    <\/tr>\r\n    <tr>\r\n        <td><strong>Bases<\/strong><\/td>\r\n<td>piece of filter extracted with DI water<\/td>\r\n<td>IC<\/td>\r\n    <\/tr>\r\n    <tr>\r\n        <td class=\"transparent\"><strong>VOCs<\/strong><\/td>\r\n<td class=\"transparent\">piece of filter extracted with CS\u2082<\/td>\r\n<td class=\"transparent\">GC MS<\/td>\r\n    <\/tr>\r\n<\/table>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-ffe980e e-flex e-con-boxed e-con e-parent\" data-id=\"ffe980e\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-f4c6706 elementor-widget elementor-widget-spacer\" data-id=\"f4c6706\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-8c86acb e-flex e-con-boxed e-con e-parent\" data-id=\"8c86acb\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-c279868 elementor-widget elementor-widget-heading\" data-id=\"c279868\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Searching for trace contaminants in deionized water EDI<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-216c98d elementor-widget elementor-widget-text-editor\" data-id=\"216c98d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>TERA Environnement can test for acids, bases and metals at very low concentration levels in the ppt to ppb range in deionized water.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d505e66 elementor-widget elementor-widget-html\" data-id=\"d505e66\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"html.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t    <style>\r\n        table {\r\n            border-collapse: collapse;\r\n            width: 100%;\r\n        }\r\n        th, td {\r\n            border: 1px solid #48a3b8;\r\n            padding: 8px;\r\n            text-align: center;\r\n            font-family: DM Sans;\r\n            font-size: 16px;\r\n        }\r\n        th {\r\n            background-color: #48a3b8;\r\n            text-align: center;\r\n            font-family: DM Sans;\r\n            color: white;\r\n        }\r\n        .transparent {\r\n            background-color: #ddebf6\r\n        }\r\n    <\/style>\r\n<\/head>\r\n<body>\r\n\r\n<table style=\"table-layout: fixed;  \">\r\n    <tr>\r\n        <th>Compounds<\/th>\r\n<th>Sample<\/th>\r\n<th>Analytical method<\/th>\r\n    <\/tr>\r\n    <tr>\r\n        <td class=\"transparent\"><strong>Acids<\/strong><\/td>\r\n<td class=\"transparent\">DI water solution<\/td>\r\n<td class=\"transparent\">CI<\/td>\r\n    <\/tr>\r\n    <tr>\r\n        <td><strong>Bases<\/strong><\/td>\r\n<td>DI water solution<\/td>\r\n<td>CI<\/td>\r\n    <\/tr>\r\n    <tr>\r\n        <td class=\"transparent\"><strong>Metals<\/strong><\/td>\r\n<td class=\"transparent\">DI water solution<\/td>\r\n<td class=\"transparent\">ICP MS or ICP OES<\/td>\r\n    <\/tr>\r\n<\/table>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-ff59da9 e-flex e-con-boxed e-con e-parent\" data-id=\"ff59da9\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-f32acec elementor-widget elementor-widget-spacer\" data-id=\"f32acec\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-fa85c5c e-flex e-con-boxed e-con e-parent\" data-id=\"fa85c5c\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-3698726 elementor-widget elementor-widget-heading\" data-id=\"3698726\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">ASML approval for Airborne Molecular Contamination (AMC) measurements<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-efc67f4 elementor-widget elementor-widget-text-editor\" data-id=\"efc67f4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Our laboratory is<strong> accredited by <a href=\"https:\/\/www.asml.com\/en\" target=\"_blank\" rel=\"noopener\">ASML<\/a> to carry out Airborne Molecular Contamination (AMC) measurements<\/strong> in the environment of lithographic equipment.<\/p><p>In microelectronics manufacturing, AMCs (including acids, bases, amines, condensable or refractory organic compounds), at levels sometimes below pptV, are critical for sensitive processes. <\/p><div>TERA Environnement supports you in these measurements, and is <strong>the only laboratory in Europe with the skills and know-how required by ASML<\/strong>.<\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-45b711d elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"45b711d\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-2a9ef6d\" data-id=\"2a9ef6d\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t<div class=\"elementor-element elementor-element-a4d8dd3 e-flex e-con-boxed e-con e-parent\" data-id=\"a4d8dd3\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-e0ad432 e-flex e-con-boxed e-con e-child\" data-id=\"e0ad432\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-50529c0 buton elementor-widget elementor-widget-button\" data-id=\"50529c0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"https:\/\/tera-environnement.com\/en\/asml-approval-for-amc-airborne-molecular-contamination-measurements\/\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">To find out more, click here!<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-e94e54d elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e94e54d\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-f0fd188\" data-id=\"f0fd188\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t<div class=\"elementor-element elementor-element-9f4c13a e-flex e-con-boxed e-con e-parent\" data-id=\"9f4c13a\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-9b066e5 elementor-widget elementor-widget-image\" data-id=\"9b066e5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/01\/ampoule-300x195.jpg\" class=\"attachment-medium size-medium wp-image-2509\" alt=\"\" srcset=\"https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/01\/ampoule-300x195.jpg 300w, https:\/\/tera-environnement.com\/wp-content\/uploads\/2024\/01\/ampoule.jpg 395w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d39145f elementor-widget elementor-widget-text-editor\" data-id=\"d39145f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>TERA Environnement has been helping its customers control chemical contamination in their cleanrooms for over 20 years!<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-5cef1b4 e-flex e-con-boxed e-con e-parent\" data-id=\"5cef1b4\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-254bc63 e-flex e-con-boxed e-con e-child\" data-id=\"254bc63\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-a4e74dd buton elementor-widget elementor-widget-button\" data-id=\"a4e74dd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"https:\/\/tera-environnement.com\/en\/contamination-control\/surface-chemical-contamination\/\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Consult our surface contamination analysis services <\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2157fb4 elementor-widget elementor-widget-spacer\" data-id=\"2157fb4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-bf7e347 e-flex e-con-boxed e-con e-parent\" data-id=\"bf7e347\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-e7b4806 e-flex e-con-boxed e-con e-child\" data-id=\"e7b4806\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-4787e23 buton elementor-widget elementor-widget-button\" data-id=\"4787e23\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"mailto:commercial@tera-environnement.com%20\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Quote request<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ec9132e elementor-widget elementor-widget-spacer\" data-id=\"ec9132e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>What are the air quality requirements for cleanrooms? Cleanrooms are rooms where the concentration of airborne particles is controlled and kept at a very low level. They are used by companies who need a very clean and sterile environment to manufacture or handle sensitive products, such as drugs, electronic chips, aerospace components, etc. Cleanrooms help [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":7043,"menu_order":1,"comment_status":"closed","ping_status":"closed","template":"elementor_header_footer","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-7052","page","type-page","status-publish","hentry"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.4 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Cleanroom air analysis<\/title>\n<meta name=\"description\" content=\"Our laboratory has over 20 years&#039; experience in controlling air contamination in cleanrooms.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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