ASML approval for AMC (Airborne Molecular Contamination) measurements
ASML is a world leader in lithography equipment for the semiconductor industry, specializing in the DUV (Deep Ultraviolet) and EUV (Extreme Ultraviolet) technologies essential to the manufacture of integrated circuits.
Based in the Netherlands, the company plays a strategic role in the microelectronics ecosystem, supplying the systems used by the world’s leading chip manufacturers.
Our laboratory is now accredited by ASML for AMC (Airborne Molecular Contamination) measurements.
We are very proud to announce that our laboratory is now referenced within ASML for the performance of Airborne Molecular Contamination (AMC) measurements in the environment of lithographic equipment.
This recognition is a major step forward: it attests that our expertise, analytical methods and operational rigor meet the technical requirements of ASML scanners and steppers, the world’s most advanced photolithography systems.
ASML imposes extremely strict requirements to guarantee the optical performance and availability of its tools, and only technically qualified laboratories can control the AMC environment around this equipment.
Eight laboratories in the world have this accreditation, and TERA Environnement is the only one in Europe to master the skills and know-how required by ASML. This distinction is all the more important as the European Union, under its European Semiconductor Regulation, aims to strengthen its technological sovereignty by doubling its share of the world market to 20%.
Why is the measurement of airborne molecular contaminants (AMC) essential in lithographic environments?
In microelectronics manufacturing, AMCs (including acids, bases, amines, condensable or refractory organic compounds) are critical to sensitive processes. At levels sometimes below pptV, some of these contaminants can:
- alter the optical surfaces of scanners (hazing),
- disrupt lithographic imaging,
- reduce yields,
- cause process failures that are difficult to diagnose,
- reduce molecular filtration lifetimes.
As products become ever more miniaturized, controlling molecular contamination has become an essential part of the latest generation of fabs, for both DUV (Deep Ultraviolet) scanners and EUV (Extreme Ultraviolet) equipment.
Clean room for semiconductor production
Our ASML approval confirms that our analysis protocols precisely meet the manufacturer’s specifications.
How can our laboratory help you characterize or control molecular contamination?
TERA Environnement has specialized in cleanroom air analysis for over 20 years, and in particular in the analysis of acids, bases, amines, volatile organic compounds, condensable organic compounds and refractories.
We support you upstream and downstream of the installation of ASML equipment:
- Installation qualification of scanners / steppers
AMC measurements in a machine environment when a new scanner arrives, to validate its compliance with OEM (Original Equipment Manufacturer) requirements.
- Requalification after maintenance or upgrade
Targeted AMC measures before returning to production to avoid any optical or process risks.
- AMC filter control and optimization
Upstream/downstream checks to ensure that filters are working properly, in line with ASML expectations and optical module warranties.
- Advanced diagnostics for process drift
Complete analysis of AMC profiles to quickly identify the source of contamination or reduced performance.
Recognition for our support of semiconductor manufacturers for over 20 years
This ASML approval reinforces and confirms our experience in air analysis for the microelectronics industry for over 20 years. Our cutting-edge expertise, our ability to offer analyses in the most sensitive environments, and our commitment to providing reliable, rapid analyses adapted to the challenges of advanced lithography are now fully recognized.
We are ready to support fabs in:
- the introduction of new tools,
- securing lithographic chains,
- solving complex AMC problems,
- continuous optimization of critical environments.
TERA Environnement has been helping its customers control chemical contamination in their cleanrooms for over 20 years!
See our cleanroom air and surface analysis services
Do you have any questions or do you need a quote? Contact us to find out more about our molecular contamination analyses.
