What is surface molecular contamination (SMC), and how does TERA Environnement analyze it?

SMC (Surface Molecular Contamination) refers to chemical contaminants deposited on cleanroom surfaces, particularly substrates and wafers during manufacturing. TERA Environnement analyzes SMC by wipe sampling using wipes moistened with deionized water (DI water) or an organic solvent, or by exposing wafers using the WOS ATD GC MS technique. Target compounds include acids, bases, metals, VOCs, organophosphorus compounds and condensables.